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Industrial Analytical Instrumentation

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XEI present a paper at AVS 62nd International
Symposium & Exhibition on plasma cleaning
of SEMs and large vacuum systems

XEI Scientific Inc. Founder and President, Ronald Vane, presented a paper in the Methodology for Improving Vacuum Performance session at the American Vacuum Society's 62nd annual International Symposium held in San Jose, in October 2015.

Ronald Vane, titled the invited paper "Plasma Cleaning of Scanning Electron Microscopes (SEMs) and Large Vacuum Systems" at the 62nd AVS International Symposium and Exhibition in San Jose, CA. This paper discusses the development of plasma cleaning for vacuum instruments and the recent extension of this cleaning technology into high vacuum.

The presentation took place in the Methodology for Improving Vacuum Performance session at the AVS International Symposium and Exhibition, in October at the San Jose Convention Center in San Jose, California. The AVS 62nd Symposium and Exhibition addressed cutting edge issues associated with materials, processing and interfaces in both the research and manufacturing communities. The weeklong Symposium fostered a multidisciplinary environment that cuts across traditional boundaries between disciplines, featuring papers from AVS Technical Division, Groups, Focus Topics on emerging technologies and more.

An extensive Exhibition of related equipment, tools, materials, supplies, chemicals, services, consulting, technical literature, and new technologies were showcased during the week.

XEI showed a new generation of Evactron systems with turbo plasma cleaning that give "The Fastest Way to Pristineā„¢" at the exhibition. A live demo of the Evactron EP plasma cleaner was featured demonstrating easy chamber plasma cleaning during continuous turbo molecular pump operation. Also demonstrated will be remote Bluetooth control of the plasma from a tablet device. Visitors visiting the booth found out about their newest models of turbo plasma cleaning devices, such as the Evactron Zephyr models and Model ES and EP, which offer faster cleaning at TMP pressures.

XEI Scientific, Inc. in profile
XEI Scientific Inc. invented the Evactron De-Contaminator in 1999 as the first plasma cleaner to use a downstream cleaning process to remove carbon from electron microscopes. A proprietary plasma source uses air to produce oxygen radicals for oxidation of carbon compounds for removal by the pumps. Carbon-free-vacuum produces the highest quality images and analytical results from SEMs and other vacuum analytical instruments. XEI innovations also include a unique RF plasma generator, a patented RF electrode, and easy start programmed plasma cleaning. All XEI products come with a 5 year limited warranty and are compliant with CE, NRTL, and Semi-S2 safety standards. XEI offers a variety of Evactron® decontamination systems to meet user needs and >2000 installations around the world

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